By David Attwood
This self-contained, entire ebook describes the elemental homes of sentimental x-rays and severe ultraviolet (EUV) radiation and discusses their functions in a wide selection of fields, together with EUV lithography for semiconductor chip manufacture and smooth x-ray biomicroscopy. the writer starts off through providing the appropriate easy rules corresponding to radiation and scattering, wave propagation, diffraction, and coherence. He then is going directly to learn a vast diversity of phenomena and purposes. the subjects lined comprise EUV lithography, biomicroscopy, spectromicroscopy, EUV astronomy, synchrotron radiation, and smooth x-ray lasers. He additionally presents loads of helpful reference fabric comparable to electron binding energies, attribute emission traces and photo-absorption cross-sections. The booklet may be of significant curiosity to graduate scholars and researchers in engineering, physics, chemistry, and the existence sciences. it's going to additionally attract training engineers all for semiconductor fabrication and fabrics science.
"This self-contained, complete ebook describes the elemental homes of sentimental x-rays and severe ultraviolet (EUV) radiation and discusses their functions in a large choice of fields, together with EUV lithography for semiconductor chip manufacture and gentle x-ray biomicroscopy."--BOOK JACKET. "The publication may be of curiosity to graduate scholars and researchers in engineering, physics, chemistry, and the lifestyles sciences. it is going to additionally attract working towards engineers inquisitive about semiconductor fabrication and fabrics science."--BOOK JACKET. Read more...
Ch. 1. creation --
Ch. 2. Radiation and Scattering at EUV and smooth X-Ray Wavelengths --
Ch. three. Wave Propagation and Refractive Index at EUV and tender X-Ray Wavelengths --
Ch. four. Multilayer Interference Coatings --
Ch. five. Synchrotron Radiation --
Ch. 6. Physics of sizzling Dense Plasmas --
Ch. 7. severe Ultraviolet and smooth X-Ray Lasers --
Ch. eight. Coherence at brief Wavelengths --
Ch. nine. smooth X-Ray Microscopy with Diffractive Optics --
Ch. 10. severe Ultraviolet and X-Ray Lithography
Read Online or Download Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications PDF
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Additional resources for Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications
Example text
21. For example, see data for Mo (Z = 42) in the Handbuch der Physik: R¨ontgenstrahlen, Encyclopedia of Physics: X-Rays, Vol. XXX, (Springer-Verlag, Berlin, 1957), S. Fl¨ugge, Editor, pp. 10, 338. 22. H. K. Allison, X-Rays in Theory and Experiment (Van Nostrand, New York, 1935), Second Edition. 23. I. Schiff, Quantum Mechanics (McGraw-Hill, New York, 1968), Third Edition. 24. A. Messiah, Quantum Mechanics (Wiley, New York, 1961). 25. L. Powell and B. Crasemann, Quantum Mechanics (Addison-Wesley, Reading, MA, 1961).
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3, in Synchrotron Radiation Research: Advances in Surface and Interface Science, Vol. Z. Bachrach, Editor. 5. R. Eisberg and R. Resnick, Quantum Physics of Atoms, Molecules, Solids, Nuclei, and Particles (Wiley, New York, 1985), Second Edition. 6. A. Tipler, Modern Physics (Worth, New York, 1978). 7. R. N. Taylor, “The Fundamental Physical Constants,” Phys. Today, p. BG9 (August 1995). 8. A. Nelson, “Guide for Metric Practice,” Phys. Today, p. BG15 (August 1995). 9. O. Krause, “Atomic Radiative and Radiationless Yields for K and L Shells,” J.
