By John C. Stover
Because the authoritative source on optical scattering, this ebook was once built from decades of educating light-scatter dimension and research classes to optical engineers. Dr. Stover covers scattering starting with its fundamentals and masking floor roughness calculations, measurements, instrumentation, predictions, necessities, and business purposes. additionally integrated are appendices that overview the fundamentals of wave propagation and Kirchhoff diffraction. even if you are an optical engineer at present investigating roughness-induced haze within the semiconductor undefined, or simply coming into the sector of scatter metrology, this article is going to be precious.
Contents:
- creation to gentle Scatter
- floor Roughness
- Scatter Calculations and Diffraction Theory
- Calculation of Smooth-Surface information from the BRDF
- Polarization of Scattered Light
- Scatter Measurements and Instrumentation
- Scatter Predictions
- Detection of Discrete floor and Subsurface Defects
- business Applications
- Scatter Specifications
- evaluate of Electromagnetic Wave Propogation
- Kirchhoff Diffraction from Sinusoidal Gratings
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Sample text
Rv) dxdy . 42) L/2 - L2 The shape of the two-dimensional power spectrum and its relationship to the finish of various optics is studied further in Chapter 4, where the power spectrum is found from scatter data and then used to calculate surfaceroughness parameters. The moments of the two-dimensional PSD will be used in Chapter 4 to find surface statistics from BRDF data. A one-dimensional spectrum, over frequencies propagating in a fixed direction, can be found from the two-dimensional spectrum by integrating over the frequency set propagating in the orthogonal direction.
Several inches in altitude. If you have ever driven across western Kansas, you have the general idea. The surface slopes and heights can be combined to find average surface wavelengths as in the one-dimensional case; however, in order to provide additional information, the surface power spectrum density and autocovariance functions must be defined. org/terms 44 OPTICAL SCATTERING prove to be of particular value to surface characterization by light-scatter techniques because, as has been hinted at in Chapter 1, it is central to determining the scatter pattern from smooth, clean, front-surface reflectors.
The PSD and mean square statistics are evaluated by estimators if z(x) is sampled instead of fully determined (Church and Takacs 1988). N (even) samples z,, at x„ are taken of the profile at spacing d, where n varies from 0 to N- 1. This is consistent with the notation used to generate estimators for surface statistics from the profile [Eqs. 19)]. 38) where Ef Nd ' and k varies from 1 to N12. The estimator for the one-dimensional PSD, which is similar to its integral definition [Eq. 34)], can be formed from these elements.
