By Maurice H. Francombe, John L. Vossen
This most up-to-date quantity of the well known Physics of skinny Films sequence comprises 4 chapters that debate high-density plasma resources for fabrics processing, electron cyclotron resonance and its makes use of, unbalancedmagnetron sputtering, and particle formation in skinny movie processing plasma.
- Chapter One develops a unified framework from which all "high-efficiency" resources will be considered and in comparison; outlines key parts of resource layout affecting processing effects; and highlights parts the place extra study and improvement are needed
- Chapter studies and analyzes the most kinds of electron cyclotron resonance (ECR) plasma resources appropriate for ECR PACVD of skinny movies, often ECR assets utilizing magnet coils
- Chapter 3 examines the advantages and obstacles of the recent approach, unbalanced magnetron sputtering (UBM), in addition to the incentive for its improvement, the fundamental rules of its operation and advertisement functions, and a few speculations concerning the way forward for UBM technology
- Chapter 4 describes normal phenomena saw in reference to particle formation in skinny movie processing plasmas; discusses debris in PECVD plasmas, sputtering plasmas, and RIE plasmas; provides an outline of the theoretical modeling of assorted elements of debris in processing plasmas; examines problems with apparatus layout affecting particle formation; and concludes with feedback in regards to the implications of this paintings for the keep watch over of process-induced particle contamination
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Extra resources for Plasma Sources for Thin Film Deposition and Etching
Example text
46 M. A. L I E B E R M A N A N D R. A. G O T T S C H O 20 40 60 80 100 ζ ( cm ) FIG. 20. Magnetic field amplitude for helicon waves at three different values of Reprinted from Ref. 84 with permission. C. B0/n. ANTENNA COUPLING A typical antenna used to excite the m = 1 mode is shown in Fig. 21. Other antennas are described by Chen (135). Looking at the x-y transverse coordinates shown in the figure, we see that this antenna generates a Bx field over an axial antenna length which can couple to the transverse magnetic field of the helicon mode.
36 M. A. L I E B E R M A N A N D R. A. G O T T S C H O evanescent downstream of the resonance in the region 1 _ ω | ω ω < £ £ < 1 ω and is propagating otherwise. For wpe « ω, the region of evanescence is thin (in z), and the wave can tunnel through this region to propagate again further downstream. As co pe increases toward ω, less power can tunnel through. For œpe > ω, the wave is always evanescent downstream of the resonance. For WKB wave propagation, the time-averaged power per unit area carried by the wave is Sr = iZo V / 2 2 £R HPO, (37) where Z 0 = ( μ 0 / ε 0 ) « 377 ohms is the impedance of free space.
To estimate i r e s we note that an electron passing through the zone coherently gains energy for a time i r e s such that |ω -
